High Resolution Single-Component Resists Based on Terpolymers Having Photoacid-Generating Camphorsulfonyloxymaleimide Units
Author :
S.-T. Kim, J.-B. Kim, J.-M. Kim*, C.-M. Chung, K.-D. Ahn
Journal :
Journal of Photopolymer Science and Technology, 10, 489-492
Publication Date :
1997-08-04
Papers :
papers
Update Date :
16-07-20 00:11
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